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Sensor - High Sensitivity Micro Angle Sensor

Joint research with AIST, production of a head fixation device, ultra-compact, high precision, high response, multi-degree-of-freedom 2D detection.

The adoption of a unique optical system using semiconductor lasers (LD) and split-type photodiodes (PD) has achieved innovative downsizing and increased detection speed. High precision comparable to that of a photoelectric two-axis autocollimator has been attained. This groundbreaking sensor serves as a measurement device for quality control and can be stationed in equipment as an angle sensor, providing a flexible and easy solution to angle measurement demands. Since the light source is a red laser, setup is easy.

  • Sensors

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